Thin photodiodes for a scintillator-silicon well detector

In developing position sensitive radiation sensors, e.g. for medical imaging, low-gain silicon well sensors were made for the detection of scintillation light. The 3/spl times/3 arrays include N/sup ++/NP diodes, processed in the /spl sim/12 /spl mu/m thick membranes that remain after thinning of 530 /spl mu/m thick [100] silicon wafers by means of a potassium hydroxide (KOH) solution. A comparison is made for the light detection efficiency of these diodes with that of a 500 /spl mu/m thick PIN photodiode.