Integrated single and two-phase micro heat sinks under IGBT chips

Experiments have been performed to assess the feasibility of single and two-phase micro heat exchangers applied to the cooling of insulated gate bipolar transistor (IGBT) power components. After a brief recall of the principal characteristics of such heat exchangers, prototypes that have been built and tested are described. Then, the experimental measurements are compared to the predictions of the thermal and hydraulic performance with water and the inert fluorocarbon liquid (FC72) as coolant fluids.