Simulation for Optical Response of High-Speed Traveling Wave Electro-Optic Polymer/TiO2 Multilayer Slot Waveguide Modulators

In this paper, we analyze a traveling wave electrode as it drives a high-speed electro-optic (EO) polymer/TiO
₂
multilayer slot waveguide modulator by simulation. To enhance its mode confinement, the EO polymer is clipped by TiO
₂
slot waveguide films, and the electrode atop the active region and connection transmission line are optimized to match the impedance at 50 Ω. The optical response is over 200 GHz at 3-dB bandwidth with a 1-cm-long electrode. By comparison, the optical response with silicon TiO
₂
layers is only 20 GHz with transverse electric (TE) polarized light.