Scanning nonlinear dielectric microscope with submicron resolution

This article describes a new purely electrical technique for imaging the state of remanent polarization of a ferroelectric material by measuring the microscopic point-to-point variation of its nonlinear dielectric constants. First, the theory for detecting polarization is described. Secondly, the technique for measuring the nonlinear dielectric response is described. Finally, using this new microscope, area scans are obtained of the polarization domains in a periodically polarized and a multidomain lithium tantalate substrate, and of lead zirconate titanate ceramic and thin film.