A Monolithically Integrated Multisensor Platform

The integration of multiple sensors on a single substrate is reported in this paper. A test chip was designed using the integration platform that implemented a capacitive inertial sensor, a capacitive absolute pressure sensor, a resistive temperature sensor, and a capacitive microphone. The sensors were tested after fabrication with the measured acceleration sensitivity of 10 fF/g for a full scale acceleration of 2 g and the pressure sensor sensitivity of 10 fF/KPa for a full scale pressure of 1 atm. Temperature sensor and microphone were also electrically tested.