Implantation induced optical losses in GaAs-AlGaAs distributed Bragg mirrors

We have examined the use of oxygen as an efficient species for creating current confinement in implanted VCSELs. Although oxygen isolation is a widely studied topic, it is rare to find in the literature the study of the optical damage caused by the oxygen implant. This optical damage is extremely consequential in VCSELs due to the weak gain guidance provided by the gain profile. In order to study the oxygen implantation induced optical damage, an n-type modulation doped, graded composition mirror was grown by low pressure MOCVD.