Quantitative Analysis of TM Lateral Leakage in Foundry Fabricated Silicon Rib Waveguides

We show that thin, shallow ridge, silicon-on-insulator waveguides exhibiting a lateral leakage behavior can be designed and fabricated using a standard silicon photonic foundry platform. We analyze the propagation loss through the observation of the transmitted TM polarized guided mode and TE polarized radiation and experimentally demonstrate that propagation losses as low as 0.087 dB/mm can be achieved. This demonstration will open a new frontier for practical devices exploiting a lateral leakage behavior with potential applications in the fields of biosensing and quantum optics among others.