Time and Temperature Dependent Study of Zn and Ni Codiffused LiNbO3 Waveguides

Zn and Ni codiffused lithium niobate planar and channel waveguides are fabricated at various temperatures for different times. Compositional and optical properties of the waveguides are studied. Single-mode channel waveguides are measured for 2-D refractive index profiling using a modified end-fire coupling method at excitation wavelengths of both 633 and 1550 nm. Planar waveguides with the same metallic thicknesses as those of channel waveguides are analyzed using secondary-ion-mass-spectrometry to obtain the diffused metal ion concentration profiles. The relationship between the diffusion depths and index depths is discussed based on the completeness of the diffusion process.