MEMS-Type Self-Packaged Field-Emission Electron Source

This paper describes a Micro-Electro-Mechanical System-type self-packaged field-emission electron source with a carbon nanotube cathode. It is a multilayer silicon-glass structure, fabricated by the use of the multiple anodic bonding process. Emission characteristics obtained for two- and three-electrode configurations have been reported. The influence of the encapsulation conditions on emission degradation in time has been investigated.