Microactuators and micromachines

Research and development in microelectromechanical systems (MEMS) have made remarkable progress since 1988, when an electrostatic micromotor the size of a human hair was first operated successfully. Since then, many types of microactuators utilizing various driving forces and mechanisms have been developed. Distinctive features of MEMS (miniaturization, multiplicity of components, and the integration of microelectronics) have led to promising application areas such as fluidic microsystems. In the future, MEMS promises to make contributions to the society of the twenty-first century in three broad areas: (1) offering easier access to information, (2) making human lifestyles more compatible with the environment, and (3) improving people's social welfare. This paper will discuss some of the technological issues pertaining to microactuators, micromachines, and the future development of MEMS.