A MIMO Double Resonant Controller Design for Nanopositioners

A design of a double resonant controller to enhance the high-speed nanopositioning performance of a piezoelectric tube scanner (PTS) is presented in this paper. The design of the controller is demonstrated using a multi-input multi-output framework for damping, tracking, and cross coupling control in the PTS. A reference model control technique is applied to design the controller. The controller proposed in this paper achieves a bandwidth near to the first resonance frequency of the PTS. The controller is robust against changes in the resonance frequency of the PTS due to load change on the scanner. Experimental results using open-loop, closed-loop, and the built-in AFM proportional integral controller are presented to show the effectiveness of the proposed controller.