Ultrasonic beam formation by pMUTs array using epitaxial PZT thin films on γ-Al2O3/Si substrates

We have proposed γ-Al
₂
O
₃
thin films as an epitaxial buffer layer on Si substrates for obtaining epitaxial Pb(Zr,Ti)O
₃
(PZT) thin films and reported a 2-D ultrasonic image sensor and measurement and analysis of ultrasonic transmission using piezoelectric micromachined ultrasonic transducers (pMUTs) on γ-Al
₂
O
₃
/Si substrates. -6 dB beamwidth and sound pressure at 5 mm from surface of the 4 channel pMUT array were exbited 10 times larger than signle pMUT. These experimental results good agree with analysis results. It will be applied to design miniature 2-D pMUTs array ultrasonic probe.