Improving Resolution and Run Outs of a Superconducting Noncontact Device for Precision Positioning

This paper describes the improvement of the performance of a long-stroke high-precision positioning slider suitable for cryogenic environments due to the application of a set of design rules given in a previous paper. The device, based on superconducting magnetic levitation, is self-stable and does not make contact between the slider and the guideline, avoiding tribological and lubrication problems associated with cryogenics. This new prototype was built and tested in a relevant environment at ~15 K and high vacuum (~10
^-6
Pa), demonstrating an enhanced resolution (70 ± 10 nm RMS), lateral run out (about ±2 μm), and angular run outs (between tens to hundreds of μrad). In addition, new data related to the dynamics of the mechanism are presented. The demonstration of the design rules for this sort of mechanism provides a probed useful tool for engineers and increases the readiness of the technology. The demonstrated performance of the mechanism makes it suitable for applications where high-precision positioning is required over a long range in cryogenic environments like in far-infrared interferometry.