Apparatus for studying the three-dimensional structure of thin films by electron holography

Electron holographic apparatus is intended to obtain and analyze three-dimensional structure of organic and inorganic films, fibers and macromolecules with thickness up to 10 nm. The main units of the apparatus is a compact ultrahigh-vacuum chamber, the sample positioning system, a point coherent source of electrons and system of registration and processing of holographic images. Apparatus control and processing of holographic images using a computer system, for which we developed the appropriate software.