Low-Bremsstrahlung X-Ray Source Using a Low-Voltage High-Current-Density Nanostructured Field Emission Cathode and a Transmission Anode for Markerless Soft Tissue Imaging

We report the design, fabrication, and proof-of-concept characterization of an X-ray generator for improved X-ray absorption imaging that uses a nanostructured field emission cathode as the electron source and a microstructured transmission anode as the X-ray generating structure. Field emission cathodes consume less power, respond faster, and tolerate lower vacuum than the thermionic cathodes used in conventional X-ray generators. The use of a transmission anode, instead of a conventional reflection anode, allows filtering of the background radiation (bremsstrahlung) while allowing efficient generation of X-ray at lower voltages by exciting atomic shell transitions, resulting in emission of X-ray with narrow spectral linewidth for sharper imaging of biological tissue. The fabricated field emission cathode contains arrays of self-aligned and gated silicon field emitters. The field emission cathodes turn on at bias voltages as low as 25 V, and their gates transmit almost 100% of the electrons to the anode. The cathodes produce per-emitter electron currents in excess of 2 μA (current density >2 A/cm
²
) at a bias voltage of 80 V. A desktop rig is built to generate X-ray with a field emission cathode and transmission anode. Using the facility, we obtained X-ray absorption images of several objects. The images clearly show details under 500 μm in size, as well as soft tissue and fine bone structures without using contrast agents.