Multi-frequency CMUT arrays for imaging-therapy applications

Novel multi-frequency Capacitive Micromachined Ultrasound Transducer (CMUT) arrays with interlaced low and high-frequency elements are investigated for novel imaging-therapy applications. Our interlaced CMUTs are designed with device dimensions smaller than operating wavelengths. This permits low- and high-frequency CMUT cells to be interlaced monolithically on a scale smaller than the array wavelengths. This dense interlacing scheme thus offers the promise of co-registered dual-frequency-band operation with minimal deleterious grating lobes and with maximal overlap of low- and high-frequency beams.