Wavelength tuning and controlled temperature dependence of MEMS VCSELs with thermally and electrostatically actuated micromachined mirror

We demonstrate the wavelength tuning of 850nm-GaAs-VCSELs with a controlled temperature dependence of wavelengths using a thermally and electrostatically actuated MEMS structure. The wavelength tuning and the control of the temperature dependence are independently realized. The result indicates a possibility of realizing tunable and athermal VCSELs with engineerd temperature dependence.