MEMS-based state feedback control of multi-body hydraulic manipulator

This paper presents closed-loop state feedback motion control of a heavy-duty hydraulic manipulator using solely micro-electro-mechanical systems (MEMS) rate gyroscopes and linear accelerometers for joint angular position, velocity and acceleration feedback. For benchmarking, incremental encoders with 2 million counts per revolution are also used to supply the joint motion state feedback. The two motion state estimation methods are compared using Cartesian path trajectory closed-loop control experiments with both position feedback-based proportional control and motion state-based feedback control. The experiments show that the proposed MEMS-based state feedback control yields comparable tracking results compared with the high accuracy encoder. Furthermore, the MEMS-based angular acceleration estimation in particular is free from typical differentiation induced noise amplification and post-filtering phase-lag.