A 3.3 V operated variable transmission attenuator based on subwavelength grating

This paper presents a nanoelectromechanical system (NEMS) variable transmission attenuator based on a gap variable subwavelength grating with a low drive voltage. An array of parallel-plate actuators is deployed over a through hole. The transmitted light intensity decreased from 63.3% to 46.5% with a drive voltage of 3.2 V at a wavelength of 775 nm.