SiC — FET based SO2 sensor for power plant emission applications

Large combustion power plants produce significant amount of SO
₂
and it is important to have good sensors to be able to control and optimize the efficiency of the desulphurization units. Static operation showed insufficient to provide good quantification of SO
₂
concentration, and therefore dynamic operation with temperature cycling is studied. The data are analyzed with Linear Discriminant Analysis (LDA) and Partial Least Square (PLS) Regression. SO
₂
quantification can be achieved with LDA, even when the oxygen background concentration changes from 4-10%.