High coercive L10 FePt-X granular films with small opening-up of in-plane hysteresis loop by using conductive TiN intermediate layer

The effects of a TiN intermediate layer on the microstructure and magnetic properties of the FePt films were investigated. With introducing TiN intermediate layer the chemical ordering and magnetic properties of FePt films significantly improved. The FePt film with 5nm TiN exhibited a large perpendicular anisotropy and smaller opening-up of in-plane hysteresis loop with out-of-plane coercivity of 13.7 kOe and in-plane coercivity of 0.24 kOe. Moreover, with doping C and SiO
_x
, FePt film with coercivity around 20 kOe, a single layer structure, and small FePt grain size of 5.6 nm in average diameter was obtained.