Cantilever actuated by piezoelectric Parylene-C

We developed the first MEMS cantilever resonator actuated by piezoelectric Parylene-C, which is a new piezoelectric material for its integration into/with MEMS because it can be deposited at room temperature and electrically poled at 200°C with 400V of DC bias. After our first report on Parylene-C as a new piezoelectric material, we demonstrated here the first MEMS cantilever resonator actuated by piezoelectric PA-C.