More effective troubleshooting using data collection on etch equipment: case studies

The complexity of etch equipment and etch processes drives the need for equally complex troubleshooting systems. Advanced data collection software allows the user to collect and store data from every wafer that is processed. The ability to retrieve the data and review either individual wafer information or data trends has become an effective tool for troubleshooting. Situations that are extremely difficult to troubleshoot without the ability to retrieve process data include intermittent equipment malfunctions, problems found during subsequent processing or inspections, and problems detected at probe. Data collection and archiving gives maintenance and engineering the opportunity to analyze the data long after the process is complete. Analysis of the data often leads to solutions that will prevent another occurrence. Case studies will be used to display the effective utilization of data collection for troubleshooting complex etch problems.