ESD Engineering Fully Silicided Large MOSFET Driver for Maximum $It\hbox{1}$ Performance

Simultaneous optimization of LDD and antipunch-through implant conditions for ESD performance of very large width silicided output driver NMOSFET without snapback mode of operation is reported. Physical mechanisms responsible for performance improvement and device sensitivity to pulse rise time, with little or no dependence on TLP pulsewidth, are detailed.