Design for semiconductor manufacturing. Bibliography

Interest in integrating the design and manufacture of semiconductor devices has been growing over the past decade. Often referred to as design for manufacture (DFM), integrated product development seeks to conceive and refine design alternatives that make the best use of manufacturing capabilities, in terms of the various materials, processes, tools, equipment, and facilities available to realize the design. While there is a large and growing literature on DFM generally, comparatively little of the published work addresses design for semiconductor manufacturing (DFSM) specifically, or the unique technologies and special circumstances of the semiconductor industry. In this paper, we present the results of a DFSM literature and software survey undertaken during the period June 1995 through August 1996. We describe the methods and sources used in the survey and include the complete abstracts of 61 articles determined to be most significant for DFSM. Also included is listing and brief description of some related software packages, which are available commercially or by anonymous ftp from a number of World Wide Web sites.