Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga
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focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C,4Hι0) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75μm external diameter and 12μm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of threedimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-spacewiring with 0.1 μm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.