A MEMS X-Band capacitive directional coupler

In this paper we analyze and design an X-Band capacitive directional coupler in order to achieve a high degree of coupling between ports and to avoid using very close transmission lines due to restraints in the micromachining process. It is included a brief description of the analytical procedure used to validate the proposed circuit design. Finally, the exposed concepts are used to design the physical structure of the coupler and its further simulation using a CAD EM software. Currently, the designed devices have been sent to be built to FBK-RST (Fondazione Bruno Kessler - IRST). We are expecting their arrival in order to begin the phases of casing, characterization and modeling.