Micro-torque sensor based on differential force measurement

A torque sensing device based on differential force measurement having a resolution of 0.05 /spl mu/N.m over a working range from -200 /spl mu/N.m to 200 /spl mu/N.m is presented, The volume of the device is 3 cm by 3 cm by 1 cm. This paper shows that the simultaneous use of silicon bulk-machined components and miniaturised high precision mechanical structures in a hybrid configuration can solve industrial measurement problems elegantly.