Thermal modeling of novel monolithic pyroelectric infrared image sensors

In this paper, we present designing, fabrication and thermal simulation of smart 1024-element (32 × 32) monolithic pyroelectric infrared image sensors. A sol-gel deposited PZT(001) thin film was used as a pyroelectric material. We tailored the geometries and dimensions of devices in designing smart image sensors. The influence of thermal isolator has shown to significantly reduce the heat loss to the device structure and environment. Introducing circular type pixels instead of rectangular type ones, has confirmed to obtain an optimal design of smart image sensor, with the maximal temperature change of 4 mK at a response frequency of 10 Hz.