A bulk micromachined vertical nano-gap Pirani wide-range pressure test structure for packaged MEMS performance monitoring

A nano-gap Pirani gauge for integration with bulk MEMS sensors and actuators was fabricated by cutting-edge high aspect ratio bulk micromachining. The 150nm-wide, 5000nm-dep vertical trench enables wide-range pressure measurement; the device showed sensitity in all the tested range from 6.3 to 101.3kPa. ±0.27% of power variation around 35 mW was measured for ±1 kPa of pressure change from atmospheric pressure.