Monolithic integration of MQW modulators on an optical multiplexer on InP for 100 Gb/s transmission

We report on an InP-based optical multiplexer integrated with high-speed multiquantum-well (MQW) electroabsorption modulators for 100 Gb/s transmission. The optical multiplexer is based on a multimode interference (MMI) splitter, a waveguide array, and a taper-type combiner designed using the beam propagation method (BPM). The modulators are integrated on the top of the optical multiplexer. The integrated device is fabricated by three step epitaxy using metal organic vapor phase epitaxy (MOVPE) and by dry etching. The static and dynamic performances are measured, leading to the generation and the modulation of a 100 GHz optical pulse train. This optical pulse train is also coded using a pseudorandom nonreturn to zero (NRZ) pattern.