Design of low-loss distributed MEMS phase shifter

An 90° and an 180° wide-band distributed MEMS transmission line phase shifters are designed respectively on a 500 ¿m sillion substrate for Ka-band in this documents. Both with the insert loss lower than -0.38 dB and -0.41 dB, and the return loss less than -10 dB. The final phase shift are 89.51° for 90° phase shifter and 176.09° for 180° phase shfter.