A low noise, high resolution silicon temperature sensor

High resolution temperature measurement is essential for determination of blood perfusion in biomaterials. A compact, low noise, high resolution temperature sensor designed for use in an invasive tissue property measurement probe is presented. The circuit is based on traditional proportional-to-absolute-temperature (PTAT) principles. A feedback technique is used to improve linearity and reduce noise. Data from test chips shows temperature resolution of 3 m/spl deg/C. The chips were fabricated using a 1.75 /spl mu/m double poly, single metal modified CMOS process designed for this project.