Integration of costing, yield and performance metrics into the TCAD environment through the combination of DOE and RSM

This paper details a procedure that uses a Total TCAD framework for producing costing and yield response surfaces in addition to the normal performance related information. It uses CALPHURNIA to integrate the simulation and experimental design software into the same environment. In addition to the transfer of data between the two packages, CALPHURNIA also automates the fitting of response surfaces and the creation of response distribution information for the design of robust processes. CAESAR is used to manage the process, device and circuit simulators while RS/1 performs the experimental design role. The costing and yield information is held as formulas within RS/1 which, when combined with the process details, can produce response surfaces of cost information that can be used to help the process designer select the most appropriate operating region.