ULSI inspection system using digital scanning confocal microscopy with applications to PZT film

The Scanning Confocal Microscope has been proposed as an observation method of the 3D objects with a high aspect ratio in the field of biology, physics and electronics etc. By processing a confocal microscopy 2D image which is a kind of tomogram by the optical sectioning, we have developed a new inspection method of the 3D structure of the semiconductor device. In this paper, we describe a reconstruction of the surface microstructure and its application to PZT film with Digital Scanning Confocal Microscopy.