High-power single-mode selectively oxidized vertical-cavity surface-emitting lasers

Single-mode vertical-cavity top-surface-emitting lasers with maximum output power of 2.7 mW and side-mode suppression of 50 dB have been fabricated using solid source MBE for growth and selective oxidation to define the 3-μm diameter active area. Threshold current is 290 μA and a maximum wallplug efficiency of 27% is obtained at an output power of 1 mW.