Transverse mode electrostatic microactuator for MEMS-based HDD slider

In this paper, we propose a new head slider concept for hard disk drives (HDDs) which will be completely batch-fabricated on a sacrificial layer together with a transverse mode electrostatic microactuator using MEMS-based technology. We present the design, fabrication, and testing of a prototype electrostatic microactuator in transverse mode without a slider body just to determine the basic characteristics. Test results showed a stroke of 0.55 /spl mu/m and a very high mechanical resonant frequency of 34 kHz due to the low moving mass of 0.85 /spl mu/g and the large force, estimated to be 23.5 /spl mu/N, generated by the actuator.