Study of neural network motion control of piezoelectric actuation systems for micro/nano manipulation

This paper investigates the feasibility of a neural network motion control methodology applied in the piezoelectric actuation systems for micro/nano manipulation. This control methodology is proposed for tracking desired motion trajectories in the presence of unknown system parameters, non-linearities including the hysteresis effect, and external disturbances in the micro/nano manipulation systems. The advantage of this control methodology is that no prior knowledge of the system parameters, or of the initial estimates of the neural networks, is required for the physical realisation of the control system. Simulation results of the control methodology for tracking a desired motion trajectory are presented. This control methodology can be utilised to realise high performance micro/nano manipulation systems driven by piezoelectric actuators.