Analysis of Magnetic Shielding Effects for Thin-Film Inductors

Issues related to magnetic shielding effects are discussed for inner-coil type thin-film inductors with closed magnetic circuits. The relationship between magnetic shielding effects, mutual inductance, and proximity effects are investigated using the finite integral equation method. The results show that obvious shielding effects occur in the inductors and that the mutual inductance is not influenced by the shielding effects.