Micro- and nanosystems based on vibrating structures

Invention of the scanning force microscope in 1986 and development of micro and nanofabrication technologies yielded a new generation of vibration based miniature sensors of physical, chemical and biological parameters, with sensitivity which could not be achieved before. This promoted again the research of micro and nanoelectromechanical systems (MEMS and NEMS) in the fields that have been dominated by semiconductor electronics for more than a half of century.