An integrated photolithography system framework for automatic manufacturing in mass production 300mm Fab

This paper describe an integration solution to achieve automatic manufacturing in the photolithography area of ProMOS's 300 mm fabrication facilities. An automation integration system framework that unifies automation system, photolithography systems and production control mechanisms, is developed to fulfill the factory level of mechanical automation dispatching in the 300 mm Fab, leading to continuous and uninterrupted processing. The pervasive use of automatic manufacturing direct operating costs, factory efficiency, simplifies production control, and caters internal/external customer demands.