I. Introduction
Solid state RF switches are important components of Radar T/R modules, satellite communication systems and Joint Tactical Radio Systems (JTRS). Recently, high power switches made of AlGaN/GaN heterostructure field-effect transistors (HFETs) demonstrated superior performance over other RF switching devices in terms of maximum power density, bandwidth, operating temperature and breakdown voltage. Many applications including JTRS and low-noise receivers require RF switches with a very low insertion loss, typically below 0.3 dB. Exceptionally high 2-D electron gas densities at the AlGaN/GaN interface make III-Nitride HFET-based RF switches ideal candidates for such applications. Since low-loss switches dissipate little RF power, they can be fabricated over low-cost sapphire substrates. The feasibility of high-power broadband monolithically integrated III-Nitride HFET RF switches has been demonstrated in [1]. Large-signal analysis and experimental data show that switching powers exceeding can be achieved using this device [2].