Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer

We describe and present detailed performance characterizations for an enhanced version of our MEMS based phase shifting interferometer (MBPSI) that achieves times denser motion reconstruction at an our original system. We measure the noise level to be lesplusmn6 nm lambda for a 66 nm laser) and the frequency resolution to be les Hz for Hz motion captured at Hz. We have successfully tracked a piezo based actuator driven with an arbitrary waveform composed of transients les Hz.