Thin-Film Temperature Sensors for Biological Measurements

Dynamic as well as static temperature measurements are now possible in biological tissue using thin-film Cu-Ni microthermocouples. These probes which use a quartz substrate exhibit response times of less than a millisecond with thermal properties similar to tissue. Their thermoelectric EMF of 21 , μm V/°C is linearly dependent on temperature over the range normally encountered in biological measurements. Probe-tip diameters as small as 10 μm are being fabricated.