Picosecond pulse propagation images and oppositely polarized pulse shapes on CPS lines measured by a Scanning Force Optoelectronic Microscope

We have developed a novel ultra-fast voltage measurement system, the scanning force optoelectronic microscope (SFOEM), by integrating a scanning force microscope (SFM) and an optical sampling technique. This paper describes a method by which a 2ps pulse propagation image directed along the edge of a coplanar strip (CPS) has been recorded using the SFOEM. It also describes how oppositely polarized pulses on each line of the CPS were measured by the SFOEM. These results demonstrate that the SFOEM is a useful tool not only for measuring ultra-fast voltage and pulse propagation images but also for analyzing the operation of ultra-fast LSI devices.