A High Throughput On-Wafer RFIC Tester

Volume RFIC production requirements are driving industry to seek higher throughput lower cost on-wafer comprehensive dc and RF test capability than can be implemented using traditional "rack and stack" test systems. To meet RFIC volume test demands, an in-house on-wafer test system based upon HP's 84000 RFIC tester was designed and implemented. With the resulting system a 23X on-wafer test throughput improvement has been achieved over a prior test system implementation.