Sure Methods of On-Wafer Scattering Parameter Measurements with Self-Calibration Procedures

This article is directed towards methods of network analyzer calibration with the 15-term full model. The 15-term full model includes all leakage errors between on-wafer probe tips. This model is well suited to eliminate measurement errors of network analyzer measurements on the wafer. All presented procedures are so-called self-calibration methods, allowing for standards that are not completely known. This allows to create calibration standards in an easy way and to monitor the calibration process. Furthermore, the presented TMRN procedure is especially designed for coaxial measurement problems and the presented MORN procedure is designed for on-wafer measurements. Experimental results of the MORN and the TMRN method testify the very good accuracies and viabilities of these 15-term self-calibration procedures by measurements.