Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording

Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording were examined by high resolution scanning electron microscopy (SEM) combined with selective chemical etching of the films using dilute aqua regia. A 150-nm-thick Co-Cr film over Ti underlayer for perpendicular recording was examined with this method. The CP (chrysanthemum-like pattern) structures (Maeda et al., 1986) due to the compositional separation were clearly observed. (Co-Cr-Pt)/Cr films for longitudinal recording were also examined. Even in this case, it was also possible to observe the compositional separation by SEM. The effects of sputtering condition on compositional separation and magnetic properties of (Co-Cr-Pt)/Cr films were investigated.<
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