Helical microstructures grown by laser assisted chemical vapor deposition

It is reported that laser-assisted chemical vapor deposition (LCVD) was used for growth in free space of microscale rods and helical structures of silicon. Using a newly developed rotable goniometer stage, the LCVD technique was also used for fabrication of a tungsten coil on a cylindrical silicon substrate, i.e. a simple microsolenoid was realized. The microstructure of the silicon deposits was investigated by cross-sectional transmission electron microscopy (TEM), and their mechanical strength was evaluated by micromechanical testing in situ in an SEM. The resistivity of the tungsten coil is measured, and the magnetic properties of the microsolenoid are investigated by means of SQUID equipment.<
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