Single-mode, phosphorus-doped silica waveguides in silicon V-grooves

Single-mode, phosphorus-doped glass waveguides have been formed in silicon V-grooves by chemical vapor deposition. The fabrication process is reproducible, involves few steps, and produces waveguides with a loss on the order of 0.1 dB/cm at a wavelength of 0.633 mu m. These waveguides are compatible with passive V-groove fiber alignment and out-of-plane coupling from integrated taps and end facets to surface-mounted optoelectronic devices.<
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